- Substrate transfer
- Load locks
- Vacuum chambers
- Repeatable throughput
- Precise handling
- Reduced intervention
Description
The SIASUN SM15 Vacuum Robot transfers substrates (such as wafers) or sensitive parts between load locks, vacuum chambers, and internal stations in integrated process tools.
Supports repeatable throughput, precise handling, and reduced human intervention in semiconductor manufacturing.
The SM15 serves semiconductor, inspection, and industrial vacuum handling applications.
Contact for pricing and availability.
Features
Specs
| Model | SM15 |
|---|---|
| Robot Type | Vacuum robot |
| Target Use | Semiconductor process tools |
| Brand | SIASUN |
Industries
Frequently Asked Questions
Contact us for current pricing, availability, and a tailored quote on the SIASUN Vacuum Robot SM15.
The SIASUN SM15 Vacuum Robot transfers substrates between load locks and process tool stations. Precise handling for semiconductor manufacturing throughput.
The SIASUN Vacuum Robot SM15 is well suited to Industrial applications.
Yes. Robotix Market ships worldwide with full logistics support, customs handling, and after-sales assistance.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
Recently Viewed
You haven't viewed any products yet.
