- Silicon wafers
- LED sapphire
- High rigidity
- Vibration suppression
- High-speed motion
- Lightweight structure
Description
The SIASUN SM12 Vacuum Robot handles silicon wafers and LED sapphire substrates. Design emphasizes rigidity, vibration suppression, and high-speed motion via lightweight structure.
Operates in controlled vacuum or vacuum-adjacent environments with repeatable substrate handling.
The SM12 serves semiconductor, LED, and industrial substrate handling applications.
Contact for pricing and availability.
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