- Vacuum manipulator
- Cluster tools
- Deposition/etch
- Load locks
- Metrology stations
- Vacuum conditions
Description
The SIASUN PHOENIX PLUS Series Vacuum Manipulator operates within vacuum process equipment such as cluster tools for deposition, etch, or related vacuum processing.
Transfers wafers or substrates between load locks, process modules, and metrology stations while maintaining controlled vacuum conditions.
The Phoenix Plus Series serves semiconductor and industrial vacuum handling applications.
Contact for pricing and availability.
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SIASUN Vacuum Manipulator Phoenix Plus Series
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