- Vacuum environment
- Wafer transfer
- Cluster tool integration
- Repeatable motion
- High uptime
- Particle reduction
Description
The SIASUN Vacuum Robot Archer Series transfers wafers or substrates between process chambers in clustered equipment. Designed for vacuum environments with repeatable motion and high uptime.
Integrated with front-end automation modules and vacuum cluster tools to reduce particle generation and maintain clean manufacturing.
The Archer Series serves semiconductor and industrial vacuum processing applications.
Contact for pricing and availability.
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